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Robust optimization of adiabatic tapers for coupling to slow-light photonic-crystal waveguides
Tapered structure coupling photonic crystal waveguides candles nano
2015/8/7
We investigate the design of taper structures for coupling to slow-light modes of various photonic-crystal waveguides while taking into account parameter uncertainties inherent in practical fabricatio...
Symbiotic Optimization of the Nanolithography and RF-Plasma Etching for Fabricating High-Quality Light-Sensitive Superconductors on the 50 nm Scale
Symbiotic Optimization Nanolithography High-Quality Light-Sensitive Superconductors
2010/11/24
We present results of a fabrication-process development for the lithographic pattern transfer into the nm100sub range by combining electron-beam lithography and reactive dry etching to obtain ...