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Improvement of temperature uniformity in rapid thermal processing systems using multivariable control
Temperature uniformity rapid heat treatment system a semiconductor chip the chip temperature distribution the chip
2015/8/12
During rapid thermal processing (RTP) of a semiconductor wafer, maintenance of near-uniform wafer temperature distribution is necessary. This paper addresses the problem of insuring temperature unifor...
Dynamics and control of a rapid thermal multiprocessor
Kinetics thermal multiprocessor semiconductor chips nonlinear model the control strategy
2015/8/12
A first-principles low-order model of rapid thermal processing of semiconductor wafers is derived. The nonlinear model describes the steady-state and transient thermal behavior of a wafer with approxi...
Multivariable feedback control of semiconductor wafer temperature
Multivariate semiconductor chip temperature temperature control chip rapid heat treatment semiconductor chips sensors
2015/8/12
The authors consider the problem of wafer temperature control in rapid thermal processing (RTP) of semiconductor wafers. They present a novel approach to the analysis of candidate sensor configuration...
In the March 23 issue of the journal Nature Materials, they describe how a magnetic field roughly the size of a medical MRI reduced the amount of heat flowing through a semiconductor by...
Full electrical control of Charge and Spin conductance through Interferometry of Edge States in Topological Insulators
Full electrical control of Charge Spin conductance Topological Insulators
2010/11/24
We investigate electron interferometry of edge states in Topological Insulators. We show that,
when inter-boundary coupling is induced at two quantum point contacts of a four terminal setup,
both Fa...