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High-Q aluminum nitride photonic crystal nanobeam cavities
High-Q aluminum nitride photonic crystal nanobeam cavities Optics
2012/5/29
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposited AlN-on-insulator ...
Demonstration of high-Q TE-TM photonic crystal nanobeam cavities
high-Q TE-TM photonic crystal nanobeam cavities Physics
2010/11/16
We experimentally demonstrate high Quality factor dual-polarized TE-TM photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed u...