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Optical and Electrical Properties of SnO2:F Thin Films Obtained by R.F. Sputtering With Various Targets
SnO2 F Thin Films R.F Various Targets
2010/12/16
Tin oxide films were deposited on glass substrates by reactive and non reactive r.f. sputtering using different types of targets corresponding to various Sn/F atomic ratio: hot pressed Sn–SnF2 or SnO2...