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Investigation of the structure and properties of PVD and CVD coatings deposited on the Si3N4 nitride ceramics
Tool materials PVD CVD Si3N4
2010/2/9
Purpose: Comprehensive structure and properties investigation results of the multilayer, multi-component, gradient PVD and CVD coatings developed on the Si3N4 nitride tool ceramics substrate are prese...
Purpose: Investigation of structure and properties of the Al2O3 based Al2O3+ZrO2, Al2O3+TiC and Al2O3+SiC(w) type based oxide tool ceramics coated with the anti-wear mono- and multilayers of the TiN, ...