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Study of structural and optical properties of TiO2:Tb thin films prepared by high energy reactive magnetron sputtering method
TiO2 magnetron sputtering Tb
2011/5/11
This work is focused on structural and optical properties of TiO2 thin films doped with different amount of terbium. The thin films have been prepared by high energy reactive magnetron sputtering (HE ...
Properties of AlNx thin films prepared by DC reactive magnetron sputtering
aluminum nitride (AlN) thin films
2011/5/10
In this paper, the results of investigation of the influence of cathode current on optical and dielectric AlNx thin-film properties are presented. AlNx films were prepared by pulsed DC reactive magnet...
Electrical resistivity of copper oxide thin films prepared by reactive magnetron sputtering
Electrical properties Magnetron sputtering Thin films
2010/2/10
Purpose: Investigation the effect of varying r.f. power and oxygen flow rates during deposition on the electrical properties of copper oxide thin films prepared by reactive magnetron sputtering Design...